Sputter Targets¶
Sputter targets are the source materials used in physical vapor deposition. Each target has specific composition, power settings, and usage history that affect your deposited films.
Overview¶
This schema package defines:
- DTUTarget - A sputter target with composition, dimensions, power ratings, and usage tracking
Targets extend NOMAD's CompositeSystem entity, providing:
- Unique lab IDs for inventory management
- Composition tracking (elements and stoichiometry)
- Power and voltage parameters
- Usage history (hours sputtered, replacement tracking)
- Supplier information
Typical Usage¶
- Register new target: When a target arrives, create a
DTUTargetentry with composition, size, and power specifications - Reference in sputtering: Each DTUSputtering process references the targets used and their operating conditions
- Track usage: Monitor target lifetime and schedule replacements
- Correlate with results: Link film properties to specific targets (useful for identifying contamination or target aging effects)
Why Track Targets?¶
Target properties directly affect film quality:
- Composition variations: Even small differences in target composition affect film stoichiometry
- Aging effects: Target surface changes over time, affecting deposition rate and film quality
- Power history: Previous high-power sputtering can modify target surface
- Cost tracking: Expensive targets need careful lifetime management
Related Schemas¶
- Used in: Sputtering Deposition
- Creates: Samples and Libraries (via sputtering)
- Co-used with: Gas Supplies, Instruments
Schema Documentation¶
DTUTarget¶
description: Class autogenerated from yaml schema.
inherits from: nomad.datamodel.metainfo.basesections.v1.CompositeSystem, nomad.datamodel.data.EntryData
properties:
| name | type | |
|---|---|---|
| main_material | str |
The main material of the target. |
| supplier_id | str |
|
| target_number | int |
The target number. |
| purity | float64 |
|
| impurity_file | str |
Upload a text file specifying the impurities here. File has to be created with a separate code. |
| thickness | float64 |
unit=meter |
| total_thickness | float64 |
unit=meter |
| bonded | bool |
default=False |
| magkeeper_target | bool |
default=True |
| refill_or_mounting_date | nomad.metainfo.data_type.Datetime |
|
| time_used | float64 |
The time the target or cracker has been used in the system unit= second |
| datetime | nomad.metainfo.data_type.Datetime |
The delivery date of the target. |
| main_phases | nomad.datamodel.metainfo.basesections.v1.PureSubstanceComponent |
sub-section, repeats |
| impurities | nomad.datamodel.metainfo.basesections.v1.PureSubstanceComponent |
sub-section, repeats |
normalization:
The normalizer for the DTUTargets class.
Args: archive (EntryArchive): The archive containing the section that is being normalized. logger (BoundLogger): A structlog logger.