Gas Supplies¶
Gas supplies track the process gases used in deposition and annealing. Proper gas documentation ensures reproducibility and helps troubleshoot contamination issues.
Overview¶
This schema package defines:
- DTUGasSupply - A gas cylinder or supply with gas type, purity, cylinder number, and supplier information
Gas supplies extend NOMAD's CompositeSystem entity, providing:
- Unique lab IDs for inventory management
- Gas composition (Ar, O₂, N₂, etc.)
- Purity specifications (99.999%, etc.)
- Cylinder identification numbers
- Supplier and batch tracking
Typical Usage¶
- Register gas cylinders: When cylinders arrive, create
DTUGasSupplyentries with purity and cylinder numbers - Reference in processes: Sputtering and RTP processes reference the gas supplies used
- Track consumption: Monitor cylinder usage and replacement schedules
- Quality control: Link film properties to specific gas batches for contamination troubleshooting
Why Track Gas Supplies?¶
Gas quality is critical for many processes:
- Purity matters: Even trace impurities can affect film properties (especially for electronic materials)
- Contamination troubleshooting: If unexpected impurities appear, gas supply records help identify the source
- Reproducibility: Different gas suppliers or batches can produce different results
- Cost management: High-purity gases are expensive; tracking helps optimize usage
Common Gases at DTU Nanolab¶
- Argon (Ar) - Sputter gas (typically 99.999% purity)
- Oxygen (O₂) - Reactive sputtering, oxidation treatments
- Nitrogen (N₂) - Nitride formation, inert atmosphere
- Forming gas (H₂/N₂) - Reduction and annealing
Related Schemas¶
- Used in: Sputtering Deposition, RTP
- Creates: Samples and Libraries (via synthesis processes)
- Co-used with: Targets, Instruments
Schema Documentation¶
DTUGasSupply¶
description: Class autogenerated from yaml schema.
inherits from: nomad.datamodel.metainfo.basesections.v1.CompositeSystem, nomad.datamodel.data.EntryData
properties:
| name | type | |
|---|---|---|
| in_use | bool |
Indicates whether the gas supply is currently in use. default= False |
| molecular_formula | str |
The molecular formula of the gas, in lower case (Ex: h2s for 10% H2S in Ar, ar for Ar). This ensure functioningreferencing. |
| molecular_mass | float64 |
unit=gram |
| cas_number | str |
|
| supplier_id | str |
|
| purity | float64 |
|
| impurities | str |
|
| date_of_production | nomad.metainfo.data_type.Datetime |
|
| date_of_installation | nomad.metainfo.data_type.Datetime |
|
| total_volume_consumption | float64 |
unit=meter ** 3 |
| time_used_gas | float64 |
unit=second |
| gas_name | str |
|
| iupac_name | str |
|
| inchi | str |
|
| inchi_key | str |
|
| smiles | str |
|
| canonical_smiles | str |
|
| test_var | ['Gas', 'Gas2', 'Gas3'] |
default=Gas |
normalization:
The normalizer for the DTUGasSupply class.
Args: archive (EntryArchive): The archive containing the section that is being normalized. logger (BoundLogger): A structlog logger.