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Gas Supplies

Gas supplies track the process gases used in deposition and annealing. Proper gas documentation ensures reproducibility and helps troubleshoot contamination issues.

Overview

This schema package defines:

  • DTUGasSupply - A gas cylinder or supply with gas type, purity, cylinder number, and supplier information

Gas supplies extend NOMAD's CompositeSystem entity, providing:

  • Unique lab IDs for inventory management
  • Gas composition (Ar, O₂, N₂, etc.)
  • Purity specifications (99.999%, etc.)
  • Cylinder identification numbers
  • Supplier and batch tracking

Typical Usage

  1. Register gas cylinders: When cylinders arrive, create DTUGasSupply entries with purity and cylinder numbers
  2. Reference in processes: Sputtering and RTP processes reference the gas supplies used
  3. Track consumption: Monitor cylinder usage and replacement schedules
  4. Quality control: Link film properties to specific gas batches for contamination troubleshooting

Why Track Gas Supplies?

Gas quality is critical for many processes:

  • Purity matters: Even trace impurities can affect film properties (especially for electronic materials)
  • Contamination troubleshooting: If unexpected impurities appear, gas supply records help identify the source
  • Reproducibility: Different gas suppliers or batches can produce different results
  • Cost management: High-purity gases are expensive; tracking helps optimize usage

Common Gases at DTU Nanolab

  • Argon (Ar) - Sputter gas (typically 99.999% purity)
  • Oxygen (O₂) - Reactive sputtering, oxidation treatments
  • Nitrogen (N₂) - Nitride formation, inert atmosphere
  • Forming gas (H₂/N₂) - Reduction and annealing

Schema Documentation

DTUGasSupply

description: Class autogenerated from yaml schema.

inherits from: nomad.datamodel.metainfo.basesections.v1.CompositeSystem, nomad.datamodel.data.EntryData

properties:

name type
in_use bool Indicates whether the gas supply is currently in use.
default=False
molecular_formula str The molecular formula of the gas, in lower case (Ex: h2s for 10% H2S in Ar, ar for Ar). This ensure functioningreferencing.
molecular_mass float64 unit=gram
cas_number str
supplier_id str
purity float64
impurities str
date_of_production nomad.metainfo.data_type.Datetime
date_of_installation nomad.metainfo.data_type.Datetime
total_volume_consumption float64 unit=meter ** 3
time_used_gas float64 unit=second
gas_name str
iupac_name str
inchi str
inchi_key str
smiles str
canonical_smiles str
test_var ['Gas', 'Gas2', 'Gas3'] default=Gas

normalization:

The normalizer for the DTUGasSupply class.

Args: archive (EntryArchive): The archive containing the section that is being normalized. logger (BoundLogger): A structlog logger.